CIA-RDP96-00792R000500490003-7

7
Approved For Release 2001/03/07 : CIA-RDP96-00792R000500490003-7
M-120
ML
Tuesday
January 13, 1987
Daily SAP
Sovie t. s Abstracts Publication
Published by
FOREIGN TECHNOLOGY DIVISION
Author:
Savel'yev, A.
Title:
HERE DEVELOPS AUTOMATION FOR
INSPECTING SEMICONDUCTORS
Primary source: Leninskoye znamya,
December 17, 1986, No. 286 (20306),
p. 1, col. 2
Extract: The precision and reli-
ability of elements of electronic
devices and systems play a decisive
role in determining their perform-
ance.
Processes that take place in
semiconductors, however, are such
that making and inspecting semicon-
ductors require very sharp electron-
ic 'eyes' and a very shrewd elec-
tronic 'brain. '
A group of scientists and design-
ers of the USSR Academy of Sciences
Institute of Radio Engineering and
Electronics (IRE) under the direc-
tion of academician Yu. V. Gulyavev
and Doctor of Physical-Mathematical
Sciences A. G. Zhdan, head of a
laboratory, has developed an auto-
mated system for complete process-
ing of experimental data from spec-
troscopy of electronic states (de-
fects) on 'semiconductor -- dielec-
tric' boundaries (ASPOED), and also
an automated complex for inspecting
and diagnosing electronic materials
and products using e .ectrophysical
methods.
What benefits do hese develop-
ments offer?
THE ASPOED system seemingly
'filters out' useful data from the
mass of information from experi-
ments, and with it the accuracy of
(continued next column)
determining characteristics of de-
fects increases by more than 10
times.
This greatly increases the
understanding of the nature of de-
fects, and as a practical benefit
it makes it possible to develop new
instruments for more reliable con-
trol of processes for production of
microelectronic devices.
The automated complex will help
to determine and control character-
istics of semiconductor materials,"
devices and microstructures using
various electrophysical methods
which traditionally are used in
semiconductor physics research.
This complex is needed today by
many research laboratories, and
especially by industry laboratories.
It will help to improve substantially
the control of processes and to
identify causes of defects. The com-
plex has been made ready for series
production, and the rest is up to
interested clients.
*
*
*
Author:
Mokhorov, E., correspondent
(Kaluga)
Title :
AUTO ELECTRONICS ORGANIZATIONS
SEEKING WAYS THROUGH BUREAUCRACY
Primary source: Sotsialisticheskaya
industriya, December 30, 1986, No.
299 (5290), p. 1, cols. 1-3
Extract :
In the near future, micro-
processor-based devices which exist
now only in the form of a single
prototype will control the ignition
systems of passenger cars and trucks
(contiBU82R606566490003-7
Approved For Release 2001/03/07 : CIA-RDP96-007